Hassan, Mothana A., Martin, Haydn and Jiang, Xiangqian (2014) Surface profile measurement using spatially dispersed short coherence interferometry. Surface Topography: Metrology and Properties, 2 (2). 024001. ISSN 2051-672X
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Abstract
Improved online techniques for surface profile measurement can be beneficial in high/ultra-precision manufacturing, in terms of enabling manufacture and reducing costs. This paper introduces a spatially dispersed short-coherence interferometer sourced by a super luminescent diode. This technique uses a broadband light source, which is spatially dispersed across a surface using a reflective grating and a scan lens. In this way, the phase data pertaining to surface at height is spectrally encoded. The light reflected from the surface is interfered with a reference beam in a Michelson interferometer, after which the resulting fringes are interrogated by a spectrometer. Phase shifting interferometry is used to extract the spectrally encoded phase information by analysing four captured frames using a Carré algorithm procedure; in this way, surface height can be determined across a profile on a sample. The short coherent light utilized in this interferometric technique means it has the potential for an application as a remote probe through an optical fibre link. This paper describes the concept of a spatially dispersed short coherence interferometer and provides some of the initial experimental results.
Item Type: | Article |
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Subjects: | T Technology > T Technology (General) T Technology > TK Electrical engineering. Electronics Nuclear engineering |
Schools: | School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies > EPSRC Centre for Innovative Manufacturing in Advanced Metrology |
Related URLs: | |
Depositing User: | Haydn Martin |
Date Deposited: | 30 Jan 2014 10:36 |
Last Modified: | 06 Apr 2018 17:01 |
URI: | http://eprints.hud.ac.uk/id/eprint/19525 |
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