High Resolution Dispersed Reference Interferometry

Williamson, James, Martin, Haydn and Jiang, Xiang (2013) High Resolution Dispersed Reference Interferometry. In: Proceedings of Computing and Engineering Annual Researchers' Conference 2013 : CEARC'13. University of Huddersfield, Huddersfield, pp. 212-217. ISBN 9781862181212

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Abstract

Dispersed reference interferometry (DRI) is a single point measurement technique with potential for use in applications such as absolute displacement, surface topography and film thickness measurement. A dispersed reference interferometer using a short coherence near infrared light source is described with chromatic
dispersion in the reference arm introduced by a pair of matched transmission gratings. By tracking the point of symmetry of the produced interferogram, absolute position measurement may be performed. A previously demonstrated method (Martin 2013) to provide single point measurements is described and further simulated
and experimental evidence is provided to demonstrate the potential capability of DRI to provide higher vertical resolution relative measurement while maintaining range.

Item Type:	Book Chapter
Uncontrolled Keywords:	Optical interferometry, surface measurement, optical metrology, profile measurement.
Subjects:	T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General)
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group School of Computing and Engineering > Computing and Engineering Annual Researchers' Conference (CEARC)
Related URLs:	Author Author
Depositing User:	Sharon Beastall
Date Deposited:	19 Dec 2013 09:11
Last Modified:	17 Aug 2017 19:20
URI:	http://eprints.hud.ac.uk/id/eprint/19393

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