A new low-energy ion implanter for bombardment of cylindrical surfaces

Renier, M., Lucas, A.A. and Donnelly, S. E. (1985) A new low-energy ion implanter for bombardment of cylindrical surfaces. Vacuum, 35 (12). pp. 577-578. ISSN 0042-207X

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Abstract

An ion implanter of cylindrical geometry is described suitable for uniform implantation at a few keV of inert gas ions of narrow energy distribution into conducting targets of axial symmetry. For helium implantation the ion current in the present device can easily be maintained at over 1 mA, allowing high dose implantation of large areas (several tens of cm2) in minutes. For temperature control of the target, a thermal shunt is incorporated. The sizes and the implantation energy of the device are scalable. Reactive gases can also be implanted with the device when operated at lower pressures and ion currents.

Item Type:	Article
Subjects:	Q Science > QC Physics
Schools:	School of Computing and Engineering > Electron Microscopy and Materials Analysis
Related URLs:	Author
Depositing User:	Graeme Greaves
Date Deposited:	02 Oct 2013 08:20
Last Modified:	04 Apr 2018 14:15
URI:	http://eprints.hud.ac.uk/id/eprint/18676

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