Thermal evolution of gas from a solid following detrapping and diffusion during a linear tempering schedule

Donnelly, S. E. and Ingram, DC (1978) Thermal evolution of gas from a solid following detrapping and diffusion during a linear tempering schedule. Vacuum, 28 (2). pp. 69-72. ISSN 0042-207X

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Abstract

A numerical analysis has been performed to determine the form of evolution rate transients resulting from detrapping and diffusion of gas implanted into a solid substrate (so-called substitutional pop-out) during a linear tempering schedule of the form T = T0 + at. The way in which the temperature for maximum release rate and the e−1 width of the transient vary as a function of the ratio of migration energy, E, to detrapping energy, Q, has been determined for a range of values of detrapping energy, Q, and diffusion starting depth, p. A general criterion has been derived which indicates that the diffusion process plays a significant role when E/Q ≳ 1−0.16 log p.

Item Type:	Article
Subjects:	Q Science > QC Physics
Schools:	School of Computing and Engineering > Electron Microscopy and Materials Analysis
Related URLs:	Author
Depositing User:	Graeme Greaves
Date Deposited:	02 Oct 2013 10:10
Last Modified:	04 Apr 2018 14:00
URI:	http://eprints.hud.ac.uk/id/eprint/18664

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