Chen, Xiaomei, Cao, Hang, Zhou, Zili and Qi, Aihui (1998) Design of a Laser Heterodyne Interferometer for 2-D Nanometer Scale Measurement. Optoelectronic Engineering, 25 (1). pp. 18-22. ISSN 1003-501X
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Abstract
The design of a 2-D laser heterody ne interferometer w ith 2nm uncertainty
and 0. 5nm r esolutio n w ithin 50Lm measuring range is proposed in the paper. The acousto-optic modulator and frequency-stabilizing He-Ne laser will be used to obtain an orthogonal polarized frequency laser beam with less than 200 kHz frequency difference. Both polarization interfero-meters at X and Y axes are differential interferometer. Phase demodulation technology will be used for heterodyne interference signal processing.
Item Type: | Article |
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Uncontrolled Keywords: | Laser interferometers, Displacement measurement , Nanotechnology, optical design |
Subjects: | T Technology > TK Electrical engineering. Electronics Nuclear engineering |
Schools: | School of Computing and Engineering |
Related URLs: | |
Depositing User: | Xiaomei Chen |
Date Deposited: | 29 Jan 2013 15:04 |
Last Modified: | 28 Aug 2021 20:12 |
URI: | http://eprints.hud.ac.uk/id/eprint/16610 |
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- Design of a Laser Heterodyne Interferometer for 2-D Nanometer Scale Measurement. (deposited 29 Jan 2013 15:04) [Currently Displayed]
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