Fabrication of Freeform Micro Optics by Focused Ion Beam

Sun, Ji Ning, Luo, Xichun, Chang, Wen Long and Ritchie, James M. (2012) Fabrication of Freeform Micro Optics by Focused Ion Beam. Key Engineering Materials, 516. pp. 414-419. ISSN 1662-9795

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Abstract

n this work, two kinds of freeform micro optics were successfully fabricated by using focused ion beam machining. A divergence compensation method was applied to optimize the machining process. Both dynamic variation of the sputter yield and the extra ion flux contributed by the beam tail were taken into consideration. Measurement results on the surface topography indicated that 3-fold improvement of the relative divergence was achieved for both optics when compared with conventional focused ion beam milling without any corrections. Furthermore, investigations on the influences of scanning strategies, including raster scan, serpentine scan and contour scan, were carried out. The serpentine scan is recommended for the fabrication of freeform optics by focused ion beam technology owing to the minimal beam travelling distance over the pattern area.

Item Type:	Article
Subjects:	T Technology > T Technology (General) T Technology > TJ Mechanical engineering and machinery
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies
Related URLs:	Author
Depositing User:	Sara Taylor
Date Deposited:	13 Dec 2012 15:17
Last Modified:	28 Aug 2021 11:25
URI:	https://eprints.hud.ac.uk/id/eprint/16349

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