Senin, N., Blunt, Liam and Tolley, M. (2012) Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 226 (11). pp. 1819-1832. ISSN 0954-4054
Metadata only available from this repository.Abstract
A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.
Item Type: | Article |
---|---|
Subjects: | T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General) |
Schools: | School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group |
Related URLs: | |
Depositing User: | Sharon Beastall |
Date Deposited: | 13 Sep 2012 09:42 |
Last Modified: | 04 Apr 2018 13:00 |
URI: | http://eprints.hud.ac.uk/id/eprint/14877 |
Downloads
Downloads per month over past year
Repository Staff Only: item control page
![]() |
View Item |