Senin, N., Blunt, Liam and Tolley, M. (2012) Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 226 (11). pp. 1819-1832. ISSN 0954-4054

A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.