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Self-assembled hexagonal ordering of Si nanocrystals embedded in SiO2 nanodots

Nassiopoulou, A G, Gianneta, V V, Huffman, M, Reading, M A, Van den Berg, Jakob, Tsiaoussis, I and Frangis, N (2008) Self-assembled hexagonal ordering of Si nanocrystals embedded in SiO2 nanodots. Nanotechnology, 19 (49). p. 495605. ISSN 0957-4484

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Highly dense hexagonally ordered two-dimensional arrays of Si nanocrystals embedded in SiO2 nanodots were fabricated on a silicon substrate by using a self-assembled porous anodic alumina thin film as a masking layer through which electrochemical oxidation of the Si substrate and ultralow energy Si implantation took place. After removal of the alumina film and high temperature annealing of the samples, hexagonally ordered Si nanocrystals embedded within SiO2 nanodots were obtained, having sizes in the few tens of nanometer range. The fabricated ordered structures show significant potential for applications either in basic physics experiments or as building blocks for nanoelectronic and nanophotonic devices.

Item Type: Article
Subjects: Q Science > QC Physics
Schools: School of Applied Sciences
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Depositing User: Sharon Beastall
Date Deposited: 03 Jan 2012 10:23
Last Modified: 28 Aug 2021 11:12


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