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Yang, Shuming (2009) A Chip Device For On-line Assessment In Nano-scale Surface Manufacture. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)
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Official URL: http://www2.hud.ac.uk/researchfestival/poster_comp...
Abstract
This project aims to create a novel system based on interferometry and
wavelength spatial scanning techniques using breakthrough micro-/nanotechnology
and optical methodologies. The system will be used for online
nano-scale surface measurement, which represents an important step
change in the fields of surface metrology.
| Item Type: | Conference or Workshop Item (Poster) |
|---|---|
| Subjects: | T Technology > TA Engineering (General). Civil engineering (General) |
| Schools: | School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group |
| Depositing User: | Cherry Edmunds |
| Date Deposited: | 22 Jul 2009 08:53 |
| Last Modified: | 03 Dec 2010 09:33 |
| URI: | http://eprints.hud.ac.uk/id/eprint/5204 |
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