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A Chip Device For On-line Assessment In Nano-scale Surface Manufacture

Yang, Shuming (2009) A Chip Device For On-line Assessment In Nano-scale Surface Manufacture. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)

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Abstract

This project aims to create a novel system based on interferometry and
wavelength spatial scanning techniques using breakthrough micro-/nanotechnology
and optical methodologies. The system will be used for online
nano-scale surface measurement, which represents an important step
change in the fields of surface metrology.

Item Type: Conference or Workshop Item (Poster)
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Depositing User: Cherry Edmunds
Date Deposited: 22 Jul 2009 07:53
Last Modified: 03 Dec 2010 09:33
URI: http://eprints.hud.ac.uk/id/eprint/5204

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