Search:
Computing and Library Services - delivering an inspiring information environment

Two-dimensional surface-profile imaging technique based on double-grating frequency shifter

Wang, Kaiwei and Zeng, L. (2005) Two-dimensional surface-profile imaging technique based on double-grating frequency shifter. Applied Optics, 44 (22). pp. 4625-4630. ISSN 0003-6935

[img] PDF
wang_Two-dimensional.pdf
Restricted to Registered users only

Download (1MB)

Abstract

A two-dimensional surface profile imaging technique that uses a low-coherence heterodyne interferometer is proposed. A double-grating frequency shifter was used in a tandem interferometer to provide the achromatic frequency shift for low-coherence light. A chopper, together with a processing circuit, was implemented to modulate the interference fringes. The surface profile was measured from the interference fringes taken by a CCD camera using a five-step method. The uncertainty in the displacement measurement is 0.34 µm for a displacement range of 43 µm. The surface profile of a glass sample with low effective reflectivity was acquired

Item Type: Article
Additional Information: UoA 25 (General Engineering) Published in Applied Optics © 2005 Optical Society of America
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Q Science > QC Physics
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
References:

References
1. H. Z. Zhao, R. Liang, D. C. Li, and M. Cao, “Practical commonpath
heterodyne surface profiling interferometer with automatic
focusing,” Opt. Laser Technol. 33, 259–265 (2001).
2. Y. L. Lo and C. H. Chuang, “New synthetic-heterodyne demodulator
for an optical fiber interferometer,” IEEE J. Quantum
Electron. 37, 658–663 (2001).
3. B. Bowe and V. Toal, “White light interferometric surface profiler,”
Opt. Eng. 37, 1796–1799 (1998).
4. M. Roy, C. J. R. Sheppard, and P. Hariharan, “Low-coherence
interference microscopy using a ferro-electric liquid crystal
phase-modulator,” Opt. Express 12, 2512–2516 (2004).
5. L. Deck and P. Degroot, “High-speed noncontact profiler based
on scanning white-light interferometry,” Appl. Opt. 33, 7334–
7338 (1994).
6. A. Hirai, K. Seta, and H. Matsumoto, “White-light interferometry
using pseudo random-modulation for high-sensitivity and
high-selectivity measurements,” Opt. Commun. 162, 11–15
(1999).
7. T. Dresel, G. Hausler, and H. Venzke, “Three-dimensional
sensing of rough surfaces by coherence radar,” Appl. Opt. 31,
919–925 (1992).
8. A. Hirai and H. Matsumoto, “High-sensitivity surface profile
measurements by heterodyne white-light interferometer,” Opt.
Eng. 40, 387–391 (2001).
9. H. Matsumoto and A. Hirai, “A white light interferometer
using a lamp source and heterodyne detection with acoustooptic
modulators,” Opt. Commun. 170, 217–220 (1999).
10. A. R. D. Somervell, M. E. K. Williams, and T. H. Barnes,
1 August 2005 Vol. 44, No. 22 APPLIED OPTICS 4629
“Direct measurement of fringe amplitude and phase using a
heterodyne interferometer operating in broadband light,” Opt.
Commun. 229, 59–64 (2004).
11. M. Akiba, K. P. Chan, and N. Tanno, “Real-time, micrometer
depth-resolved imaging by low-coherence interferometry and a
two-dimensional heterodyne detection technique,” Jpn. J.
Phys. 39, L1194–L1196 (2000).
12. F. Le Clerc, L. Collot, and M. Gross, “Numerical heterodyne
holography with two-dimensional photodetector arrays,” Opt.
Lett. 25, 716–718 (2000).
13. K. P. Chan, M. Sato, M. Akiba, and N. Tanno, “Detection
schemes for optical-coherence-domain imaging of biological tissues,”
Opt. Rev. 7, 389–395 (2000).
14. K. F. Kwong, D. Yankelevich, K. C. Chu, J. P. Heritage, and A.
Dienes, “400-Hz mechanical scanning optical delay line,” Opt.
Lett. 18, 558–560 (1993).
15. L. J. Zeng, I. Fujima, A. Hirai, H. Matsumoto, and S. Iwasaki,
“A two-color heterodyne interferometer for measuring the refractive
index of air using an optical diffraction grating,” Opt.
Commun. 203, 243–247 (2002).
16. F. Rickermann, S. Riehemann, G. von Bally, S. Breer, and K.
Buse, “A high resolution real-time temporal heterodyne interferometer
for refractive index topography,” Opt. Commun.
144, 173–179 (1997).
17. A. Hirai, L. J. Zeng, and H. Matsumoto, “Heterodyne Fourier
transform spectroscopy using moving diffraction grating,” Jpn.
J. Phys. 40, 6138–6142 (2001).
18. Y. L. Lo and C. H. Chuang, “Fluid velocity measurements in a
microchannel performed with two new optical heterodyne microscopes,”
Appl. Opt. 41, 6666–6675 (2002).
19. R. S. Sirohi and M. P. Kothiyal, Optical Components, Systems, and
Measurement Techniques (Marcel Dekker, 1990), pp. 236–237.

Depositing User: Briony Heyhoe
Date Deposited: 18 Jul 2007
Last Modified: 03 Dec 2010 08:53
URI: http://eprints.hud.ac.uk/id/eprint/291

Downloads

Downloads per month over past year

Repository Staff Only: item control page

View Item View Item

University of Huddersfield, Queensgate, Huddersfield, HD1 3DH Copyright and Disclaimer All rights reserved ©