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A single-shot line-scanning spatially dispersed short coherence interferometer using Fourier transform profilometry

Hassan, Mothana A., Martin, Haydn and Jiang, Xiang (2015) A single-shot line-scanning spatially dispersed short coherence interferometer using Fourier transform profilometry. In: Laser Metrology and Machine Performance XI, LAMDAMAP 2015. EUSPEN, Huddersfield, UK. ISBN 978-0-9566790-5-5

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Abstract

Single-shot inspection at nanoscale resolution is a problematic challenge for providing on-line inspection of manufacturing techniques such as roll-to-roll processes where the measurand is constantly moving. An example of such a measurement challenge is defect detection on vapor barrier films formed by depositing an aluminum oxide layer several tens of nanometres thick on a flexible polymer substrate. Effective detection and characterisation of defects in this layer requires a single-shot approach with nanometre scale vertical resolution.
This paper describes a line-scanning interferometer where a short coherence light source having a 25 nm linewidth source is spatially dispersed across the measurand thus encoding spatial position along a profile by wavelength. Phase shift interferometry (PSI) can be used to decode phase and thus height information, but requires multiple image captures. In order to realise single-shot measurement which is more suitable for online applications, a Fourier transform profilometry (FTP) approach is necessary. This paper explores the implementation of the FTP approach and presents a comparison of the measurement capability of FTP with the previously reported PSI method.

Item Type: Book Chapter
Subjects: Q Science > Q Science (General)
Q Science > QC Physics
Schools: School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering
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Depositing User: Mothana Hassan
Date Deposited: 16 Apr 2015 12:59
Last Modified: 04 Nov 2015 17:01
URI: http://eprints.hud.ac.uk/id/eprint/24136

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