Computing and Library Services - delivering an inspiring information environment

Surface profile measurement using spatially dispersed short coherence interferometry

Hassan, Mothana A., Martin, Haydn and Jiang, Xiangqian (2014) Surface profile measurement using spatially dispersed short coherence interferometry. Surface Topography: Metrology and Properties, 2 (2). 024001. ISSN 2051-672X

[img] PDF - Published Version
Available under License Creative Commons Attribution.

Download (471kB)


Improved online techniques for surface profile measurement can be beneficial in high/ultra-precision manufacturing, in terms of enabling manufacture and reducing costs. This paper introduces a spatially dispersed short-coherence interferometer sourced by a super luminescent diode. This technique uses a broadband light source, which is spatially dispersed across a surface using a reflective grating and a scan lens. In this way, the phase data pertaining to surface at height is spectrally encoded. The light reflected from the surface is interfered with a reference beam in a Michelson interferometer, after which the resulting fringes are interrogated by a spectrometer. Phase shifting interferometry is used to extract the spectrally encoded phase information by analysing four captured frames using a Carré algorithm procedure; in this way, surface height can be determined across a profile on a sample. The short coherent light utilized in this interferometric technique means it has the potential for an application as a remote probe through an optical fibre link. This paper describes the concept of a spatially dispersed short coherence interferometer and provides some of the initial experimental results.

Item Type: Article
Subjects: T Technology > T Technology (General)
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies > EPSRC Centre for Innovative Manufacturing in Advanced Metrology
Related URLs:
Depositing User: Haydn Martin
Date Deposited: 30 Jan 2014 10:36
Last Modified: 09 Nov 2015 11:11


Downloads per month over past year

Repository Staff Only: item control page

View Item View Item

University of Huddersfield, Queensgate, Huddersfield, HD1 3DH Copyright and Disclaimer All rights reserved ©