A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions

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Parisini, Andrea, Morandi, Vittorio, Van den Berg, Jakob, Reading, Michael A., Giubertoni, Damiano, Bailey, Paul and Noakes, T. C. Q. (2009) A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions. In: MRS 2009 Fall Meeting, 30th November - 4th December 2011, Boston. (Unpublished)

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Item Type:	Conference or Workshop Item (Paper)
Subjects:	Q Science > QC Physics
Schools:	School of Applied Sciences
Related URLs:	Conference Organisation Author
Depositing User:	Sharon Beastall
Date Deposited:	03 Jan 2012 13:20
Last Modified:	04 Sep 2012 09:45
URI:	http://eprints.hud.ac.uk/id/eprint/12274

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