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A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions

Parisini, Andrea, Morandi, Vittorio, Van den Berg, Jakob, Reading, Michael A., Giubertoni, Damiano, Bailey, Paul and Noakes, T. C. Q. (2009) A Combined Approach to the Determination of As Depth Profiling in Si Ultra Shallow Junctions. In: MRS 2009 Fall Meeting, 30th November - 4th December 2011, Boston. (Unpublished)

Metadata only available from this repository.
Item Type: Conference or Workshop Item (Paper)
Subjects: Q Science > QC Physics
Schools: School of Applied Sciences
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Depositing User: Sharon Beastall
Date Deposited: 03 Jan 2012 13:20
Last Modified: 04 Sep 2012 09:45
URI: http://eprints.hud.ac.uk/id/eprint/12274

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