Items where Author is Van Den Berg, Jakob
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FinFET
England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584
ion beam modelling
England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584
ion-implantation
England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584
PLAD
England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584
plasma doping
England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584
TRI3DYN
England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584
TRIDYN
England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584