Zhang, Peng, Li, Jie, Yu, Guoyu and Walker, David D. (2016) Development of Swinging Part Profilometer. In: Optics and Measurement 2016, 11th-14th October 2016, Liberec, Czech Republic. (Unpublished)

A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

SPIE conference oral presentation
TOPTEC Swinging Part Profilometer.pptx - Accepted Version

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