The UK MEIS facility: a new future at the IIAA, Huddersfield

The MEIS facility, formerly at STFC’s Daresbury Laboratory and used by a wide range of UK and foreign research groups, has moved to the IIAA at the University of Huddersfield. It has been fitted with a new 200 keV ion accelerator. MEIS is a powerful tool for the structural and compositional characterisation of nanolayers, including depth profiling. Further to basics of the MEIS technique, examples of its analytical capability are presented from the area of Ion beam crystallography but mainly from Depth profiling analysis.