Potter, Richard, Awad, Ahmed, Chalker, Paul R., Wang, Peng, Jones, Anthony C., Noakes, Timothy C.Q. and Bailey, Paul (2005) A superlattice approach to the synthesis of ferroelectric Strontium Bismuth Tantalate thin films using liquid-injection-MOCVD. MRS Proceedings, 902 (T). ISSN 1946-4274

The synthesis of SrBi2Ta2O9 (SBT) thin films has been investigated using a superlattice approach. Thin films were deposited on silicon by independent injection of each source to produce Bi2O3/SrTa2O6 superlattices. The effects of post-deposition annealing have been investigated using high-resolution TEM and medium energy ion scattering (MEIS) to depth profile the superlattices. X-ray diffraction has also been used to characterize the conversion of the superlattices from distinct layers of Bi2O3 and SrTa2O6 into a polycrystalline layer of strontium bismuth tantalate.