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Medium energy ion scattering for the characterisation of damage profiles of ultra shallow B implants in Si
Van den Berg, Jakob, Zhang, S, Whelan, S, Armour, D.G, Goldberg, R.D, Bailey, Paul and Noakes, T.C.Q
(2001)
Medium energy ion scattering for the characterisation of damage profiles of ultra shallow B implants in Si.
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 183 (1-2).
pp. 154-165.
ISSN 0168-583X
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