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The design and operation of an ultra-high vacuum ion implantation and ion beam deposition system
Armour, D.G., Bailey, Paul, Judge, P.A., Sharples, G., Byers, P. and Whitehead, D.
(1985)
The design and operation of an ultra-high vacuum ion implantation and ion beam deposition system.
In:
Proceedings of the Ninth Symposium on Ion Sources and Ion-Assisted Technology.
Research Group.
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