The precise deduction of initial depth distributions of diffusants from thermal evolution spectrometry

It is shown, theoretically that experimental measurement of surface evolution rate of atoms which diffuse in a solid as a function of temperature during tempering according to a schedule (dT/dt) = r1 T, can provide accurate information on the initial depth distribution of diffusant atoms and the activation energy for diffusion. More complex situations of distributed activation energy and trapping retarded diffusion are outlined.