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Number of items at this level: 7.

FinFET

England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584

ion beam modelling

England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584

ion-implantation

England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584

PLAD

England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584

plasma doping

England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584

TRI3DYN

England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584

TRIDYN

England, Jonathan, Möller, W., Van den Berg, Jakob, Rossall, Andrew, Min, W. J. and Kim, J. (2017) Combining dynamic modelling codes with medium energy ion scattering measurements to characterise plasma doping. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. ISSN 1872-9584

This list was generated on Tue Apr 16 16:05:26 2024 UTC.