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Development of Swinging Part Profilometer

Zhang, Peng, Li, Jie, Yu, Guoyu and Walker, David D. (2016) Development of Swinging Part Profilometer. In: Optics and Measurement 2016, 11th-14th October 2016, Liberec, Czech Republic. (Unpublished)

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A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

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Item Type: Conference or Workshop Item (Speech)
Uncontrolled Keywords: Optics Metrology Profilometer Astronomy
Subjects: Q Science > QB Astronomy
Q Science > QC Physics
T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TS Manufactures
Schools: Research and Enterprise Directorate
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References: [1] Walker, David D., et al. "Closing the metrology/process loop in CNC polishing." Third European Seminar on Precision Optics Manufacturing. International Society for Optics and Photonics, 2016. [2] Walker, D. D., et al. "Robotic automation in computer controlled polishing.” Journal of the European Optical Society-Rapid publications 11 (2016). [3] Walker, David, et al. "The role of robotics in computer controlled polishing of large and small optics." SPIE Optical Engineering+ Applications. International Society for Optics and Photonics, 2015. [4] Wang, Yuhao, et al. "Swing arm optical coordinate-measuring machine: high precision measuring ground aspheric surfaces using a laser triangulation probe." Optical Engineering 51.7 (2012): 073603-1. [5] Su, Peng, et al. "Swing arm optical CMM: self calibration with dual probe shear test." SPIE Optical Engineering+ Applications. International Society for Optics and Photonics, 2011. [6] Su, Peng, et al. "Swing arm optical CMM for aspherics." SPIE Optical Engineering+ Applications. International Society for Optics and Photonics, 2009. [7] Alejandro V. Maldonado, Peng Su, and James H. Burge, "Development of a portable deflectometry system for high spatial resolution surface measurements," Appl. Opt. 53, 4023-4032 (2014). [8] Dae Wook Kim ; ByoungChang Kim ; Chunyu Zhao ; ChangJin Oh ; James H. Burge; Algorithms for surface reconstruction from curvature data for freeform aspherics. Proc. SPIE 8838, Optical Manufacturing and Testing X, 88380B (September 7, 2013); doi:10.1117/12.2024285. [9] Kwon Su Chon, Yoshiharu Namba, and Kwon-Ha Yoon, "Wolter type I x-ray focusing mirror using multilayer coatings," Appl. Opt. 45, 4609-4616 (2006). [10] Lee, Dong-Hyeok. "3-Dimensional profile distortion measured by stylus type surface profilometer." Measurement 46.1 (2013): 803-814. [11] Chen, Shanyong, et al. "Error analysis and surface reconstruction for swing arm profilometry." Measurement 87 (2016): 1-12.
Depositing User: Guoyu Yu
Date Deposited: 10 Nov 2016 13:44
Last Modified: 28 Aug 2021 12:09


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