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Development of Swinging Part Profilometer

Zhang, Peng, Li, Jie, Yu, Guoyu and Walker, David D. (2016) Development of Swinging Part Profilometer. In: Optics and Measurement 2016, 11th-14th October 2016, Liberec, Czech Republic. (Unpublished)

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Abstract

A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.

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Item Type: Conference or Workshop Item (Speech)
Uncontrolled Keywords: Optics Metrology Profilometer Astronomy
Subjects: Q Science > QB Astronomy
Q Science > QC Physics
T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TS Manufactures
Schools: Research and Enterprise Directorate
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[5] Su, Peng, et al. "Swing arm optical CMM: self calibration with dual probe shear test." SPIE Optical Engineering+ Applications. International Society for Optics and Photonics, 2011.
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[8] Dae Wook Kim ; ByoungChang Kim ; Chunyu Zhao ; ChangJin Oh ; James H. Burge; Algorithms for surface reconstruction from curvature data for freeform aspherics. Proc. SPIE 8838, Optical Manufacturing and Testing X, 88380B (September 7, 2013); doi:10.1117/12.2024285.
[9] Kwon Su Chon, Yoshiharu Namba, and Kwon-Ha Yoon, "Wolter type I x-ray focusing mirror using multilayer coatings," Appl. Opt. 45, 4609-4616 (2006).
[10] Lee, Dong-Hyeok. "3-Dimensional profile distortion measured by stylus type surface profilometer." Measurement 46.1 (2013): 803-814.
[11] Chen, Shanyong, et al. "Error analysis and surface reconstruction for swing arm profilometry." Measurement 87 (2016): 1-12.

Depositing User: Guoyu Yu
Date Deposited: 10 Nov 2016 13:44
Last Modified: 12 Dec 2016 13:00
URI: http://eprints.hud.ac.uk/id/eprint/29934

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