Moschetti, Giuseppe, Muhamedsalih, Hussam, Connor, Daniel, Jiang, Xiang and Leach, Richard K. (2015) Vertical axis non-linearities in wavelength scanning interferometry. In: Laser Metrology and Machine Performance XI, LAMDAMAP 2015. EUSPEN, Huddersfield, UK, pp. 31-39. ISBN 978-0-9566790-5-5

The uncertainty of measurements made on an areal surface topography instrument is directly influenced by its metrological characteristics. In this work, the vertical axis deviation from linearity of a wavelength scanning interferometer is evaluated. The vertical axis non-linearities are caused by the spectral leakage resulting from the Fourier transform algorithm for phase slope estimation. These non-linearities are simulated and the results are compared with experimental measurements. In order to reduce the observed non-linearities, a
modification of the algorithm is proposed. The application of a Hamming window and the exclusion of edge points in the extracted phase are shown to increase the accuracy over the whole instrument range.

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