The design and operation of an ultra-high vacuum ion implantation and ion beam deposition system

Armour, D.G., Bailey, Paul, Judge, P.A., Sharples, G., Byers, P. and Whitehead, D. (1985) The design and operation of an ultra-high vacuum ion implantation and ion beam deposition system. In: Proceedings of the Ninth Symposium on Ion Sources and Ion-Assisted Technology. Research Group.

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Item Type:	Book Chapter
Additional Information:	Paper originally presented at ISIAT '85 Tokyo June 3rd-5th, 1985
Subjects:	Q Science > Q Science (General) Q Science > QC Physics
Schools:	School of Applied Sciences
Related URLs:	Author
Depositing User:	Sharon Beastall
Date Deposited:	05 Sep 2012 11:47
Last Modified:	05 Apr 2018 14:15
URI:	http://eprints.hud.ac.uk/id/eprint/14707

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