Armour, D.G., Bailey, Paul, Judge, P.A., Sharples, G., Byers, P. and Whitehead, D. (1985) The design and operation of an ultra-high vacuum ion implantation and ion beam deposition system. In: Proceedings of the Ninth Symposium on Ion Sources and Ion-Assisted Technology. Research Group.
Metadata only available from this repository.Item Type: | Book Chapter |
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Additional Information: | Paper originally presented at ISIAT '85 Tokyo June 3rd-5th, 1985 |
Subjects: | Q Science > Q Science (General) Q Science > QC Physics |
Schools: | School of Applied Sciences |
Related URLs: | |
Depositing User: | Sharon Beastall |
Date Deposited: | 05 Sep 2012 11:47 |
Last Modified: | 28 Aug 2021 11:20 |
URI: | http://eprints.hud.ac.uk/id/eprint/14707 |
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