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Vibration compensation of wavelength scanning interferometer for in-process surface inspection

Muhamedsalih, Hussam, Jiang, Xiang and Gao, F. (2010) Vibration compensation of wavelength scanning interferometer for in-process surface inspection. In: Future Technologies in Computing and Engineering: Proceedings of Computing and Engineering Annual Researchers' Conference 2010: CEARC’10. University of Huddersfield, Huddersfield, pp. 148-153. ISBN 9781862180932

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Abstract

A vibration stabilized Wavelength Scanning Interferometer (WSI) is developed for online or in-process measurement purposes. This paper describes the vibration compensation part of the WSI system. The vibration compensation is provided by multiplexing a reference interferometer with the main WSI
interferometer. The reference interferometer has a different light source and wavelength from the WSI interferometer but both are sharing common optical path. The reference interferometer serves as a phase-compensating mechanism to eliminate the effects of environmental noise. A structured surface measurement of a semiconductor daughterboard, under mechanical disturbance, is presented. The measurement results showed that the system can withstand environmental noise.

Item Type: Book Chapter
Uncontrolled Keywords: Stabilised Interferometer, Wavelength Scanning Interferometer, Piezoelectric Tranducer
Subjects: T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
School of Computing and Engineering > Computing and Engineering Annual Researchers' Conference (CEARC)
Related URLs:
Depositing User: Sharon Beastall
Date Deposited: 13 Jan 2011 13:09
Last Modified: 26 Sep 2013 08:52
URI: http://eprints.hud.ac.uk/id/eprint/9328

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