Gao, F., Peng, G. and Koenders, L. (1998) Calibration of transfer standards for SPM. Microelectronic Engineering, 41 (42). pp. 615-618. ISSN 0167-9317Metadata only available from this repository.
A scanning probe microscope was used to investigate and to calibrate some of the today available samples on the market used for calibration of other SPMs. These samples have artificial structures between 200 nm and 10 μm fabricated by optical or electron beam lithography. A SPM was used which is equipped with capacitive sensors and carefully calibrated by using laser interferometer.
|Subjects:||Q Science > QC Physics|
|Schools:||School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
|Depositing User:||Feng Gao|
|Date Deposited:||06 Jul 2010 13:13|
|Last Modified:||02 Dec 2010 13:37|
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