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A high speed scanning heterodyne interferometer for in process surface measurement

Gao, F., Wang, Kaiwei and Jiang, Xiang (2009) A high speed scanning heterodyne interferometer for in process surface measurement. In: Proceedings of the euspen International Conference – San Sebastian - June 2009. European Society for Precision Engineering & Nanotechnology, San Sebastian, Spain. ISBN 13:978-0-9553082-6-0

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Abstract

A high speed scanning heterodyne optical interferometer for surface measurement is introduced. The interferometer employs a pair of Acousto-Optical Deflectors (AOD) which provides a fixed frequency difference between the reference and measurement arms to implement rapid scanning for surface measurement. There is no mechanical moving part involved in the scanning; therefore the phase noise created by mechanical scanning which restricts its speed has been reduced. The measurement arm and the reference arm are identical which reduces the sensitivity of the interferometer to change of ambient temperature. The experiment has demonstrated the potential of on-line measurement of surface finish in the nanometre range.

Item Type: Book Chapter
Subjects: T Technology > TS Manufactures
T Technology > TJ Mechanical engineering and machinery
Q Science > QC Physics
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
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Depositing User: Feng Gao
Date Deposited: 27 May 2010 15:17
Last Modified: 02 Dec 2010 11:22
URI: http://eprints.hud.ac.uk/id/eprint/7722

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