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A novel chip interferometry system for online surface measurements.

Yang, Shuming (2009) A novel chip interferometry system for online surface measurements. Doctoral thesis, University of Huddersfield.

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    Abstract

    This thesis documents the development of a novel chip interferometry system using
    advanced microtechnology and optical methodologies. This is the first time that this
    type of system has been reported in surface metrology. The system is designed to be
    compact, robust and stable even though it does not involve noise compensation and
    feedback control. Compared to currently available techniques, this system has great
    potential for on-line surface measurements.
    This application is based on a Michelson interferometer and wavelength scanning
    method. Considering the fabrication capability and effective cost, the system consists
    of two parts, an optical chip and an optical probe. The optical chip is the main focus of
    this research and it integrates a tuneable laser, a directional coupler, an optical isolator
    and a photodetector. The research approach for the optical chip is to use a planar silica
    motherboard for the passive circuitry onto which are assembled silicon daughterboards
    containing the different chip components that are to be integrated. The theory,
    methodology and technique for these individual chip components are explored. The
    optical probe is used to collimate, diffract and focus the light beam for surface
    scanning. The individual chip components and the optical probe are applied to build
    an experimental interferometry system. Initial surface measurements by this system
    have been carried out. The experimental results provide substantive evidence that the
    chip interferometry system is feasible for on-line surface measurements.

    Item Type: Thesis (Doctoral)
    Subjects: T Technology > T Technology (General)
    T Technology > TK Electrical engineering. Electronics Nuclear engineering
    Schools: School of Computing and Engineering
    School of Computing and Engineering > Centre for Precision Technologies
    School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
    Depositing User: Sharon Beastall
    Date Deposited: 03 Dec 2009 08:57
    Last Modified: 03 Dec 2010 09:32
    URI: http://eprints.hud.ac.uk/id/eprint/6311

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