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Characterisation of surface roughness for ultra-precision freeform surfaces

Li, H., Cheung, C.F., Lee, W.B., To, S and Jiang, Xiang (2005) Characterisation of surface roughness for ultra-precision freeform surfaces. Journal of Physics: conference series, Series 13. pp. 32-35. ISSN 1742-6596

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Abstract

Ultra-precision freeform surfaces are widely used in many advanced optics applications which demand for having surface roughness down to nanometer range. Although a lot of research work has been reported on the study of surface generation, reconstruction and surface characterization such as MOTIF and fractal analysis, most of them are focused on axial symmetric surfaces such as aspheric surfaces. Relative little research work has been found in the characterization of surface roughness in ultra-precision freeform surfaces. In this paper, a novel Robust Gaussian Filtering (RGF) method is proposed for the characterisation of surface roughness for ultra-precision freeform surfaces with known mathematic model or a clould of discrete points. A series of computer simulation and measurement experiments were conducted to verify the capability of the proposed method. The experimental results were found to agree well with the theoretical results.

Item Type: Article
Subjects: T Technology > T Technology (General)
Q Science > QC Physics
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
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References:

Deng C M 2001 Digitalized Modeling and Self-Organization Fitting of Freeform Surfaces (Wuhan, China: Huazhong University of Science & Technology)

[2] Ren B Y and Hagiwara 2003 Composite freeform surface reconstruction using recursive interpolating subdivision scheme Computers in Industry 50 265-75
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[3] Jiang X Q, Blunt L and Stout K J 2000 Development of a lifting wavelet representation for characterization of surface topography Proc. R. Soc. Lond. A 456 2283-313
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[4] Li H, Jiang X and Li Z 2004 Robust estimation in Gaussian filtering for engineering surface characterization Precision Eng. 28 186-193
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Depositing User: Briony Heyhoe
Date Deposited: 27 Mar 2008 15:57
Last Modified: 02 Dec 2010 12:56
URI: http://eprints.hud.ac.uk/id/eprint/608

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