Muhamedsalih, Hussam, Jiang, Xiang and Wang, Kaiwei (2009) Surface Profile Height Measurement Using Optical Interferometry Method. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)
Abstract

Interferometer is one of the methods that are used for measuring surface profile with high accuracy reach to the order of 1/1000 of the wavelength of the light. The accuracy in a given interferomter depends on many factors such as the light source properties and environmental mechanical vibration. This poster illustrates a method to increase the accuracy of Linnik interferometer for nano-scale measurements.

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