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Surface Profile Height Measurement Using Optical Interferometry Method

Muhamedsalih, Hussam, Jiang, Xiang and Wang, Kaiwei (2009) Surface Profile Height Measurement Using Optical Interferometry Method. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)

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    Abstract

    Interferometer is one of the methods that are used for measuring surface profile with
    high accuracy reach to the order of 1/1000 of the wavelength of the light. The
    accuracy in a given interferomter depends on many factors such as the light source
    properties and environmental mechanical vibration. This poster illustrates a method
    to increase the accuracy of Linnik interferometer for nano-scale measurements.

    Item Type: Conference or Workshop Item (Poster)
    Subjects: T Technology > T Technology (General)
    T Technology > TA Engineering (General). Civil engineering (General)
    Schools: School of Computing and Engineering
    School of Computing and Engineering > Centre for Precision Technologies
    School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
    Depositing User: Cherry Edmunds
    Date Deposited: 22 Jul 2009 12:44
    Last Modified: 02 Dec 2010 11:31
    URI: http://eprints.hud.ac.uk/id/eprint/5236

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