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Surface Profile Height Measurement Using Optical Interferometry Method

Muhamedsalih, Hussam, Jiang, Xiang and Wang, Kaiwei (2009) Surface Profile Height Measurement Using Optical Interferometry Method. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)

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Abstract

Interferometer is one of the methods that are used for measuring surface profile with
high accuracy reach to the order of 1/1000 of the wavelength of the light. The
accuracy in a given interferomter depends on many factors such as the light source
properties and environmental mechanical vibration. This poster illustrates a method
to increase the accuracy of Linnik interferometer for nano-scale measurements.

Item Type: Conference or Workshop Item (Poster)
Subjects: T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Depositing User: Cherry Edmunds
Date Deposited: 22 Jul 2009 11:44
Last Modified: 22 Aug 2015 01:59
URI: http://eprints.hud.ac.uk/id/eprint/5236

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