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Muhamedsalih, Hussam, Jiang, Xiang and Wang, Kaiwei (2009) Surface Profile Height Measurement Using Optical Interferometry Method. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)
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Official URL: http://www2.hud.ac.uk/researchfestival/poster_comp...
Abstract
Interferometer is one of the methods that are used for measuring surface profile with
high accuracy reach to the order of 1/1000 of the wavelength of the light. The
accuracy in a given interferomter depends on many factors such as the light source
properties and environmental mechanical vibration. This poster illustrates a method
to increase the accuracy of Linnik interferometer for nano-scale measurements.
| Item Type: | Conference or Workshop Item (Poster) |
|---|---|
| Subjects: | T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General) |
| Schools: | School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group |
| Depositing User: | Cherry Edmunds |
| Date Deposited: | 22 Jul 2009 12:44 |
| Last Modified: | 02 Dec 2010 11:31 |
| URI: | http://eprints.hud.ac.uk/id/eprint/5236 |
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