Zhu, Hao, Blunt, Liam, Jiang, Xiang and Shaojun, Xiao (2009) Measurement and characterisation of micro nano-scale structured surfaces. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)
|PDF - Accepted Version |
This project aims to investigate basic surface metrology techniques for micro/nano-scale structured surfaces, especially MEMS surfaces. The project will focus on developing a methodology for preparing and conducting the measurement of MEMS surfaces, and furthermore to study the pattern recognition and characterisation of basic geometry specification of those micro-structures.
|Item Type:||Conference or Workshop Item (Poster)|
|Subjects:||T Technology > T Technology (General)|
|Schools:||School of Computing and Engineering|
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
|Depositing User:||Cherry Edmunds|
|Date Deposited:||22 Jul 2009 10:48|
|Last Modified:||26 Nov 2010 10:21|
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