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Measurement and characterisation of micro nano-scale structured surfaces

Zhu, Hao, Blunt, Liam, Jiang, Xiang and Shaojun, Xiao (2009) Measurement and characterisation of micro nano-scale structured surfaces. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)

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    Abstract

    This project aims to investigate basic surface metrology techniques for micro/nano-scale structured surfaces, especially MEMS surfaces. The project will focus on developing a methodology for preparing and conducting the measurement of MEMS surfaces, and furthermore to study the pattern recognition and characterisation of basic geometry specification of those micro-structures.

    Item Type: Conference or Workshop Item (Poster)
    Subjects: T Technology > T Technology (General)
    Schools: School of Computing and Engineering
    School of Computing and Engineering > Centre for Precision Technologies
    School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
    Depositing User: Cherry Edmunds
    Date Deposited: 22 Jul 2009 10:48
    Last Modified: 26 Nov 2010 10:21
    URI: http://eprints.hud.ac.uk/id/eprint/5219

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