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Zhu, Hao, Blunt, Liam, Jiang, Xiang and Shaojun, Xiao (2009) Measurement and characterisation of micro nano-scale structured surfaces. In: University of Huddersfield Research Festival, 23rd March - 2nd April 2009, University of Huddersfield. (Unpublished)
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Official URL: http://www2.hud.ac.uk/researchfestival/poster_comp...
Abstract
This project aims to investigate basic surface metrology techniques for micro/nano-scale structured surfaces, especially MEMS surfaces. The project will focus on developing a methodology for preparing and conducting the measurement of MEMS surfaces, and furthermore to study the pattern recognition and characterisation of basic geometry specification of those micro-structures.
| Item Type: | Conference or Workshop Item (Poster) |
|---|---|
| Subjects: | T Technology > T Technology (General) |
| Schools: | School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group |
| Depositing User: | Cherry Edmunds |
| Date Deposited: | 22 Jul 2009 10:48 |
| Last Modified: | 26 Nov 2010 10:21 |
| URI: | http://eprints.hud.ac.uk/id/eprint/5219 |
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