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Light-beam scanning interferometry for on-line ultra precision surface measurement

Wang, Kaiwei, Jiang, Xiang, Martin, Haydn and Blunt, Liam (2007) Light-beam scanning interferometry for on-line ultra precision surface measurement. In: 7th International Conference of the European Society for Precision Engineering and Nanotechnology 2007. Proceedings. Euspen, Bedford, pp. 302-305. ISBN 978-0-9553082-2-2

Metadata only available from this repository.
Item Type: Book Chapter
Subjects: T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
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Depositing User: Graham Stone
Date Deposited: 24 Apr 2009 15:36
Last Modified: 26 Nov 2010 11:33
URI: http://eprints.hud.ac.uk/id/eprint/4046

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