Search:
Computing and Library Services - delivering an inspiring information environment

Theoretical and experimental study on magnetically-actuated micromirrors for electromagnetic NDE

Li, Y., Tian, Gui Yun and Cui, Z. (2006) Theoretical and experimental study on magnetically-actuated micromirrors for electromagnetic NDE. In: Proceedings of Computing and Engineering Annual Researchers' Conference 2006: CEARC’06. University of Huddersfield, Huddersfield, pp. 1-6.

[img]
Preview
PDF - Published Version
Download (386kB) | Preview

    Abstract

    Magnetically-actuated Micromirrors as Micro-electromechanical devices have exhibited their
    superiority over other magnetic sensing techniques in terms of high sensitivity and high spatial
    resolution, which is favoured not only by quantitative measurement but also imaging of magnetic field
    distribution. In our research into magnetic field sensing and imaging, a 2D magnetic field sensing
    system with magnetically-actuated micromirrors has been proposed. Before the system is constructed,
    extensive investigation of magnetically-actuated micromirrors with different structures and materials
    has been conducted via theoretical and experimental study. FEMLAB and IntelliSuite have been
    employed for theoretical analysis of the sensitivity of micromirrors with different structures in
    correlation with the variation of external magnetic fields in order to optimise micromirror dimensions
    and beam cantilever design. Following the innovative fabrication of practical micromirrors, an optical
    measurement system has been set up to specifically characterise micromirrors of various dimensions
    and configurations in terms of sensitivity to the variation of external magnetic field. Detection
    sensitivity of 1 deflection degree of micromirror per Gauss of magnetic field has been achieved, which
    benefits not only the further improvement of micromirror sensitivity via optimal design and fabrication,
    but also the establishment of a micromirror-based 2D magnetic field sensing and imaging system for
    ENDE with high sensitivity and high spatial resolution.

    Item Type: Book Chapter
    Uncontrolled Keywords: MEMS, Magnetic force, Magnetically actuated micromirror, Magnetic sensor, NDE
    Subjects: Q Science > Q Science (General)
    T Technology > T Technology (General)
    Q Science > QC Physics
    Schools: School of Computing and Engineering
    School of Computing and Engineering > Systems Engineering Research Group
    School of Computing and Engineering > Computing and Engineering Annual Researchers' Conference (CEARC)
    Related URLs:
    Depositing User: Graham Stone
    Date Deposited: 03 Apr 2009 11:56
    Last Modified: 28 Jul 2010 19:32
    URI: http://eprints.hud.ac.uk/id/eprint/3805

    Document Downloads

    Downloader Countries

    More statistics for this item...

    Item control for Repository Staff only:

    View Item

    University of Huddersfield, Queensgate, Huddersfield, HD1 3DH Copyright and Disclaimer All rights reserved ©