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High resolution position measurement from dispersed reference interferometry using template matching

Williamson, James, Martin, Haydn and Jiang, Xiangqian (2016) High resolution position measurement from dispersed reference interferometry using template matching. Optics Express, 24 (9). p. 10103. ISSN 1094-4087

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Abstract

This paper describes a method to extract high resolution position
data from a dispersed reference interferometry (DRI) by applying a
template matching technique to the acquired spectral interferograms.
Calculation of the correlation coefficient between windowed spectral
interferograms acquired from the DRI apparatus and a set of numerically
calculated template interferograms allows the absolute determination of
position with nanometer resolution. Both the operating principle of the DRI
apparatus and implementation of the template matching method is
presented. Experimental validation of the method is provided through the
demonstration of position tracking and an assessment of linearity,
repeatability and noise performance

Item Type: Article
Subjects: T Technology > T Technology (General)
T Technology > TK Electrical engineering. Electronics Nuclear engineering
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:
Depositing User: Sara Taylor
Date Deposited: 03 May 2016 08:47
Last Modified: 05 Dec 2016 19:59
URI: http://eprints.hud.ac.uk/id/eprint/28190

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