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Near common-path optical fibre interferometer for potentially fast on-line micro/nano scale surface measurement

Jiang, Xiang, Wang, Kaiwei and Martin, Haydn (2006) Near common-path optical fibre interferometer for potentially fast on-line micro/nano scale surface measurement. Optical Letters, 31. pp. 3603-3605. ISSN 0146-9592

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Abstract

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

Item Type: Article
Additional Information: UoA 25 (General Engineering) Published in Optical Letters © 2006 Optical Society of America
Subjects: T Technology > TS Manufactures
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
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December 15, 2006 / Vol. 31, No. 24 / OPTICS LETTERS 3605

Depositing User: Briony Heyhoe
Date Deposited: 18 Jul 2007
Last Modified: 02 Dec 2010 12:32
URI: http://eprints.hud.ac.uk/id/eprint/279

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