Jiang, Xiang, Wang, Kaiwei and Martin, Haydn (2006) Near common-path optical fibre interferometer for potentially fast on-line micro/nano scale surface measurement. Optical Letters, 31. pp. 3603-3605. ISSN 0146-9592
Abstract

We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.

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