Metrology of MST and microfluidic devices using white light interferometery and novel surface metrology characterisation

Tools

Blunt, Liam (2006) Metrology of MST and microfluidic devices using white light interferometery and novel surface metrology characterisation. In: Micro and Nano Technology (MNT) Measurement Club, 1-day meeting, The Measurement and Characterisation of MST Devices (MEMS), Monday 27 February 2006, National Physical Laboratory, Hampton Road, Teddington, Middlesex TW11 0LW. (Unpublished)

Metadata only available from this repository.

Item Type:	Conference or Workshop Item (Other)
Subjects:	T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General)
Schools:	School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:	Conference Author
Depositing User:	Briony Heyhoe
Date Deposited:	24 Nov 2008 16:12
Last Modified:	26 Nov 2010 11:43
URI:	http://eprints.hud.ac.uk/id/eprint/2751

Item control for Repository Staff only:

View Item