Search:
Computing and Library Services - delivering an inspiring information environment

Recent advances in traceable nanoscale dimension and force metrology in the UK

Leach, Richard K., Chetwynd, D., Blunt, Liam, Haycocks, J., Harris, Peter M., Jackson, K., Oldfield, S. and Reilly, S. (2006) Recent advances in traceable nanoscale dimension and force metrology in the UK. Measurement Science and Technology, 17. pp. 467-476. ISSN 0957-0233

[img] PDF
Restricted to Registered users only

Download (737kB)

    Abstract

    It is now fully appreciated that metrology will play an integral role in the successful development and commercialization of micro- and nanotechnology. To this end, the UK Government, through the National Measurement System, funded several groundbreaking projects in its 2002–2005 Programme for Length. This paper will briefly describe the background of the research, concentrating on the technical details of the projects. The Programme for Length normally only funds work into dimensional metrology but this funding cycle also funded work into low force metrology as this area is crucial to most mechanical probing techniques. The projects described include a traceable areal contacting instrument designed to calibrate areal transfer artefacts and hence offer traceability for industrial areal instruments, the production of the areal transfer artefacts, the development of Internet-based softgauges for profile parameters, a primary low force balance with a force resolution of 50 pN and the development of methods for measuring complex micro-scale structures. Amongst others, the projects involved collaboration with PTB, TNO, Taylor Hobson, AWE, Rubert & Co. and the Universities of Warwick, Huddersfield and Eindhoven.

    Item Type: Article
    Additional Information: UoA 25 (Genaral Engineering) © 2006 IOP Publishing Ltd
    Subjects: T Technology > TA Engineering (General). Civil engineering (General)
    Schools: School of Computing and Engineering
    School of Computing and Engineering > Centre for Precision Technologies
    School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
    Related URLs:
    References:

    Brennan J K, Crampton A, Jiang X, Leach R K and Harris P M 2005 Reconstruction of continuous surface profiles from discretely sampled data Proc. 5th Euspen Int. Conf. (Montpellier, France, 8-11 May)
    Bui S H, Reneger T B and Vorburger T V 2004 Virtual surface calibration database Proc. 11th Int. Coll. on Surfaces (Chemnitz, Germany, 2-3 Feb.) pp 93-101
    Cumpson P J and Hedley J 2003 Accurate analytical measurement in the atomic force microscope: a microfabricated spring constant standard potentially traceable to the SI Nanotechnology 14 1279-88
    IOP Article
    Cumpson P J, Hedley J and Zhdan P 2003 Accurate force measurement in the atomic force microscope: a microfabricated array of reference springs for easy cantilever calibration Nanotechnology 14 918-24
    IOP Article
    Doering L, Peiner E, Nesterov V and Brand U 2004 Low noise piezoresistive micro force sensor Proc. Nanoscale (Brauschweig, Germany)
    Downs M J and Nunn J W 1998 Verification of the subnanometric capability of an NPL plane mirror differential interferometer with a capacitance probe Meas. Sci. Technol. 9 1437-40
    IOP Article
    Evans C J and Bryan J B 1999 Structured, textured or engineered surfaces Ann. CIRP 48 541-56
    Order from Infotrieve
    Forbes A B and Leach R K 2005 Self-calibration of a novel surface texture measuring instrument Proc. 7th Lambdamap Conf. (Cranfield, UK, 27-30 June)
    Fruehauf J, Gaertner E, Brand U and Doering L 2004 Silicon springs for the calibration of the force of hardness testing instruments and tactile profilometers Proc. 4th Euspen Int. Conf. (Glasgow, 31 May-2 June) pp 362-3
    Haycocks J and Jackson K 2005 Traceable calibration of transfer standards for scanning probe microscopy Precis. Eng. 29 168-75
    CrossRef Link | Inspec Abstract | Order from Infotrieve
    Henselmans R, Rosielle N, Cacace L, Kappelhof P, Klinkhamer F and Spierdijk H 2004 Low force measurement facility: mechanical design report (Technical University of Eindhoven)
    Hughes E B and Oldfield S 2003 Traceable, high accuracy thrust measurement for electric propulsion 3rd Int. Electric Propulsion Conf. (Toulouse, France, June)
    ISO 4287 1997 Geometrical product specification (GPS)-surface texture: profile method-terms, definitions and surface texture parameters (International Organization for Standardization)
    ISO 5436: Part 1 2000 Geometrical product specification (GPS)-surface texture: profile method-measurement standards-material measures (International Organization for Standardization)
    ISO 5436: Part 2 2002 Geometrical product specification (GPS)-surface texture: profile method-measurement standards-software measurement standards (International Organization for Standardization)
    Jung L, Spranger B, Krüger-Sehm R, Koenders L and Krystek M 2004 Reference software for roughness analysis-features and results Proc. 11th Int. Coll. on Surfaces (Chemnitz, Germany, 2-3 Feb.) pp 164-9
    Koenders L, Andreason J L, De Chiffre L, Jung L and Krüger-Sehm R 2004 EUROMET S-11 comparison on surface texture Metrologia 41 (Tech. Suppl.) 04001
    IOP Article
    Leach R K 2000 Traceable measurement of surface texture at the National Physical Laboratory using NanoSurf IV Meas. Sci. Technol. 11 1162-72
    IOP Article
    Leach R K 2004 Some issues of traceability in the field of surface texture measurement Wear 257 1246-9
    CrossRef Link | Inspec Abstract | ChemPort Abstract | Order from Infotrieve
    Leach R K and Bennett I 2004 Characterisation of a new vertical scanning white light interferometer-a test case? Proc. 11th Int. Coll. on Surfaces (Chemnitz, Germany, 2-3 Feb.) pp 11-8
    Leach R K and Harris P M 2002 Ambiguities in the definition of spacing parameters for surface-texture characterization Meas. Sci. Technol. 13 1924-30
    IOP Article
    Leach R K and Hart A 2002 A comparison of stylus and optical methods for measuring 2D surface texture NPL Report CBTLM 15 1-33
    Leach R K, Haycocks J, Jackson K, Lewis A J, Oldfield S and Yacoot A 2001 Advances in traceable nanometrology at the National Physical Laboratory Nanotechnology 12 R1-R6
    IOP Article
    Leach R K, Murphy J and Wilson A 2004a Design of a co-ordinate probe for characterising three-dimensional micro-structures NPL Report CBTLM 30 1-48
    Leach R K, Oldfield S, Awan S, Blackburn J and Williams J M 2004b Design of a bi-directional electrostatic actuator for realising nanonewton to micronewton forces NPL Report DEPC-EM-001 1-32
    McCarthy M B and Gee A T 1996 A 120 mm × 120 mm area photomask metrology standard with absolute position accuracy of 60 nm Proc. ASPE 11 190-5
    Order from Infotrieve
    Nunn J 2000 Calibration of 2 dimensional magnification standards for SPMs and SEMs through optical diffraction: method, traceability and uncertainties Proc. 4th Seminar on Quantitative Microscopy QM 2000 (Braunschweig, Germany) pp 17-24
    Pratt J R, Douglas D T, Newell D B, Kramer J A and Whitenten E 2004 Progress toward SI traceable force metrology for nanomechanics J. Mater. Res. 19 366-79
    CrossRef Link | Inspec Abstract | ChemPort Abstract | Order from Infotrieve
    Royal Society and Royal Academy of Engineering 2004 Nanoscience and Nanotechnologies: Opportunities and Uncertainties
    Schwenke H, Wäldele F, Weiskirch C and Kunzmann H 2001 Opto-tactile sensor for 2D and 3D measurement of small structures on coordinate measuring machines Ann. CIRP 50 361-4
    Order from Infotrieve
    Thomsen-Schmidt P and Krüger-Sehm R 2004 Development of a new stylus contacting system for roughness measurement Proc. 11th Int. Coll. on Surfaces (Chemnitz, Germany, 2-3 Feb.) pp 79-85
    Weckenmann A, Estler T, Peggs G N and McMurty D 2004 Probing systems in dimensional metrology Ann. CIRP 53 657-84
    Order from Infotrieve
    Wichmann B A, Parkin G I and Barker R 2004 Software Support for Metrology Best Practice Guide No. 1: Validation of Software in Measurement Instruments (National Physical Laboratory)
    Yacoot A and Cross N 2002 Measurement of picometre non-linearity in an optical grating encoder using x-ray interferometry Meas. Sci. Technol. 14 148-52
    IOP Article
    Yacoot A and Downs M J 2000 The use of x-ray interferometry to investigate the linearity of the NPL differential plane mirror interferometer Meas. Sci. Technol. 11 1126-30
    IOP Article

    Depositing User: Briony Heyhoe
    Date Deposited: 13 Jul 2007
    Last Modified: 26 Nov 2010 11:46
    URI: http://eprints.hud.ac.uk/id/eprint/275

    Document Downloads

    Downloader Countries

    More statistics for this item...

    Item control for Repository Staff only:

    View Item

    University of Huddersfield, Queensgate, Huddersfield, HD1 3DH Copyright and Disclaimer All rights reserved ©