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Vibration compensating beam scanning interferometer for surface measurement

Martin, Haydn, Wang, Kaiwei and Jiang, Xiang (2008) Vibration compensating beam scanning interferometer for surface measurement. Applied Optics, 47 (7). pp. 888-893. ISSN 0003-6935

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Abstract

Light beam scanning using a dispersive element and wavelength tuning is coupled with fiber-optic interferometry to realize a new surface measurement instrument. The instrument is capable of measuring nanoscale surface structures and form deviations. It features active vibration compensation and a small optical probe size that may be placed remotely from the main apparatus. Active vibration compensation is provided by the multiplexing of two interferometers with near common paths. Closed loop control of a mirror mounted on a piezoelectric transducer is used to keep the path length stable. Experiments were carried out to deduce the effectiveness of the vibration compensation and the ability to carry out a real measurement in the face of large environmental disturbance.

Item Type: Article
Additional Information: This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: http://dx.doi.org/10.1364/AO.47.000888. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:
Depositing User: Cherry Edmunds
Date Deposited: 20 Nov 2008 11:59
Last Modified: 02 Dec 2010 12:04
URI: http://eprints.hud.ac.uk/id/eprint/2734

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