Computing and Library Services - delivering an inspiring information environment

Vibration compensating beam scanning interferometer for surface measurement

Martin, Haydn, Wang, Kaiwei and Jiang, Xiang (2008) Vibration compensating beam scanning interferometer for surface measurement. Applied Optics, 47 (7). pp. 888-893. ISSN 0003-6935

[img] PDF - Accepted Version
Download (179kB)


Light beam scanning using a dispersive element and wavelength tuning is coupled with fiber-optic interferometry to realize a new surface measurement instrument. The instrument is capable of measuring nanoscale surface structures and form deviations. It features active vibration compensation and a small optical probe size that may be placed remotely from the main apparatus. Active vibration compensation is provided by the multiplexing of two interferometers with near common paths. Closed loop control of a mirror mounted on a piezoelectric transducer is used to keep the path length stable. Experiments were carried out to deduce the effectiveness of the vibration compensation and the ability to carry out a real measurement in the face of large environmental disturbance.

Item Type: Article
Additional Information: This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law.
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
Related URLs:
Depositing User: Cherry Edmunds
Date Deposited: 20 Nov 2008 11:59
Last Modified: 21 Aug 2015 23:48


Downloads per month over past year

Repository Staff Only: item control page

View Item View Item

University of Huddersfield, Queensgate, Huddersfield, HD1 3DH Copyright and Disclaimer All rights reserved ©