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A two-dimensional surface profile imaging technique based on heterodyne interferometer

Wang, Kaiwei, Cai, Z.J. and Zeng, L.J. (2005) A two-dimensional surface profile imaging technique based on heterodyne interferometer. Key Engineering Materials, 295-296. pp. 477-482. ISSN 1013-9826

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Abstract

A two-dimensional surface profile imaging technique based on heterodyne interferometer is proposed. A piezo translator vibrated grating is used to generate a heterodyne signal. A high speed CCD camera is used to extract the interference signal using a five step method. The uncertainty in the displacement measurement is approximately 0.035 μm within a measurement range of 1.7 μm, confirming the two dimensional heterodyne interferometer is valid for measuring the surface profile.
The method is also available for low coherence heterodyne interferometer due to the optical frequency shifts caused by the vibration of grating independent on the wavelength.

Item Type: Article
Subjects: T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
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Depositing User: Cherry Edmunds
Date Deposited: 20 Nov 2008 11:46
Last Modified: 03 Dec 2010 08:54
URI: http://eprints.hud.ac.uk/id/eprint/2733

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