Wang, Kaiwei, Martin, Haydn and Jiang, Xiang (2008) Actively stabilized optical fiber interferometry technique for online/in-process surface measurement. Review of scientific instruments, 79 (2). 023109. ISSN 0034-6748
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In this paper, we report the recent progress in optical-beam scanning fiber interferometry for potential online nanoscale surface measurement based on the previous research. It attempts to generate a robust and miniature measurement device for future development into a multiprobe array measurement system. In this research, both fiber-optic-interferometry and the wavelength-division-multiplexing techniques have been used, so that the optical probe and the optical interferometer are well spaced and fast surface scanning can be carried out, allowing flexibility for online measurement. In addition, this system provides a self-reference signal to stabilize the optical detection with high common-mode noise suppression by adopting an active phase tracking and stabilization technique. Low-frequency noise was significantly reduced compared with unstabilized result. The measurement of a sample surface shows an attained repeatability of 3.3 nm.
|Additional Information:||© Copyright 2008 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Review of scientific instruments Volume 79 Number 2 2008 and may be found at http://link.aip.org/link/?RSINAK/79/023109/1|
|Subjects:||Q Science > Q Science (General)|
T Technology > TA Engineering (General). Civil engineering (General)
|Schools:||School of Computing and Engineering|
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
|Depositing User:||Cherry Edmunds|
|Date Deposited:||20 Nov 2008 11:32|
|Last Modified:||19 Sep 2013 09:33|
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