Rossall, A. K., Aslanyan, Valentin, Tallents, Greg J., Kuznetsov, Ilya, Rocca, Jorge J. and Menoni, Carmen S. (2015) Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser. Physical Review Applied, 3 (6). 064013. ISSN 2331-7019Metadata only available from this repository.
Simulations and experiments are used to study extreme-ultraviolet (EUV) laser drilling of submicrometer holes. The ablation process is studied with a 2D Eulerian hydrodynamic code that includes bound-free absorption processes relevant to the interaction of EUV lasers with a solid material. Good agreement is observed between the simulated and measured ablated depths for on-target irradiances of up to 1×1010 W cm−2. An increase in the irradiance to 1×1012 W cm−2 is predicted to ablate material to a depth of 3.8 μm from a single pulse with a hole diameter 3 to 4 times larger than the focal spot size. The model allows for the simulation of the interaction of a laser pulse with the crater created by a previous shot. Multiple-pulse lower-fluence irradiation configurations under optimized focusing conditions, i.e., approaching the diffraction limit, are shown to be advantageous for applications requiring mesoscale [(100 nm)–(1 μm)] features and a high level of control over the ablation profile.
|Subjects:||Q Science > QC Physics|
|Schools:||School of Computing and Engineering|
|Depositing User:||Andrew Rossall|
|Date Deposited:||11 Mar 2016 13:33|
|Last Modified:||11 Mar 2016 13:33|
Downloads per month over past year
Repository Staff Only: item control page