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An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry

Muhamedsalih, Hussam, Blunt, Liam, Martin, Haydn, Jiang, Xiang and Elrawemi, Mohamed (2014) An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry. In: Proceedings of EUSPEN 14th International Conference 2014. EUSPEN, Dubrovnik, Croatia, pp. 177-180. ISBN 978-0-9566790-3-1

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Abstract

The quality and lifetime of flexible photovoltaic (PV) modules is dependant on having an effective vapour barrier layer which protects active elements from environmental degradation. An effective flexible barrier layer can be produced by employing a thin film of Al2O3 (40-100 nm thick) on a polymer substrate using atomic layer deposition (ALD). By measuring the surface of the barrier coating critical defects that will result in excess vapour transmission can be detected and minimised. Such, knowledge of defect size, type and distribution forms a crucial dataset for informing process control. This paper reports on a practical embedded inspection technique to measure the surface topography of the thin ALD deposited Al2O3 barrier film on a roll-to-roll manufacturing platform. The method combines wavelength scanning interferometry (WSI) along with an auto-focus method. Example measurements are given and discussed.

Item Type: Book Chapter
Subjects: T Technology > TS Manufactures
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies > EPSRC Centre for Innovative Manufacturing in Advanced Metrology
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Depositing User: Mohamed Elrawemi
Date Deposited: 06 May 2014 15:28
Last Modified: 06 Dec 2016 06:21
URI: http://eprints.hud.ac.uk/id/eprint/20158

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