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White Light Spectral Interferometry for Real Time Surface Profile Measurement

Gao, F., Tang, Dawei and Jiang, Xiang (2013) White Light Spectral Interferometry for Real Time Surface Profile Measurement. In: ASPEN 2013, 12-15, November 2013, Taipei, Taiwan. (Unpublished)

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This paper presents a high speed surface profile optical measurement technique based on
white light spectral interferometry and parallel signal processing using a general purpose graphic
processing unit (GPGPU). A white light source is used to acquire the surface profile of the sample
instantly in real time through a cylindrical Michelson interferometer. The interference signals are
resolved by a diffraction grating and recorded by a high speed CCD camera. The spectrum of the
interference signal contains the phase information in just one shot of the CCD camera frame image.
By analysing the spectrum of the interference signal, the system can measure a surface profile as the
measured surface in a moving state. As the measured surface laterally passes through the
measurement arm of the interferometer, a surface map can be constructed by combining each of the
measured profiles. Structured surface samples were measured and the results are discussed. This
measurement system can be applied for roll-to-roll processed film surface inspection.

Item Type: Conference or Workshop Item (Paper)
Subjects: Q Science > QC Physics
T Technology > TA Engineering (General). Civil engineering (General)
T Technology > TS Manufactures
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies > EPSRC Centre for Innovative Manufacturing in Advanced Metrology
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Depositing User: Feng Gao
Date Deposited: 25 Feb 2014 10:37
Last Modified: 17 May 2016 04:57


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