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Surface profile measurement using spatially dispersed short coherence interferometry

Hassan, Mothana A., Martin, Haydn and Jiang, Xiangqian (2013) Surface profile measurement using spatially dispersed short coherence interferometry. In: 11th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII) in Aachen and Braunschweig/Germany, 1-5 July 2013, Aachen and Braunschweig, Germany.

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Abstract

Improved online techniques for surface profile measurement can be beneficial in many high/ultra-precision manufacturing in terms of enabling manufacture and reducing costs. This paper introduces a spatially dispersed short-coherence interferometer sourced by a SLD (Super Luminescent Diode). This technique uses a broadband light source which is spatially dispersed across a surface using a reflective grating and a scan lens. In this way, the phase data pertaining to surface at height is spectrally encoded. The light reflected from the surface is interfered with a reference beam in a Michelson interferometer after which the resulting fringes are interrogated by a spectrometer. Phase shifting interferometry is used to extract the spectrally encoded phase information by analysing four captured frames using a Carré algorithm procedure and in this way surface height can be determined across a profile on a sample. The short coherent light utilised in this interferometric technique means it has potential for application as a remote probe through an optical fibre link. This paper describes the concept of a spatially dispersed short coherence interferometer and provides some initial experimental results.

Item Type: Conference or Workshop Item (Paper)
Subjects: Q Science > Q Science (General)
Q Science > QC Physics
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
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Depositing User: Mothana Hassan
Date Deposited: 29 Oct 2013 15:34
Last Modified: 02 Dec 2016 07:56
URI: http://eprints.hud.ac.uk/id/eprint/19007

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