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Origin of Atomic Clusters during Ion Sputtering

Rehn, L., Birtcher, R., Donnelly, S. E., Baldo, P. and Funk, L. (2001) Origin of Atomic Clusters during Ion Sputtering. Physical Review Letters, 87 (20). p. 207601. ISSN 0031-9007

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Abstract

Previous studies have shown that the size distributions of small clusters ( n≤40; n = number of atoms/cluster) generated by sputtering obey an inverse power law with an exponent between -8 and -4. Here we report electron microscopy studies of the size distributions of larger clusters ( n≥500) sputtered by high-energy ion impacts. These new measurements also yield an inverse power law, but one with an exponent of -2 and one independent of sputtering yield, indicating that the large clusters are produced when shock waves, generated by subsurface displacement cascades, ablate the surface.

Item Type: Article
Subjects: Q Science > QC Physics
Schools: School of Computing and Engineering > Electron Microscopy and Materials Analysis
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Depositing User: Graeme Greaves
Date Deposited: 01 Oct 2013 12:07
Last Modified: 01 Oct 2013 12:07
URI: http://eprints.hud.ac.uk/id/eprint/18712

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