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Comparison study of algorithms and accuracy in the wavelength scanning interferometry

Muhamedsalih, Hussam, Gao, F. and Jiang, Xiang (2012) Comparison study of algorithms and accuracy in the wavelength scanning interferometry. Applied Optics, 51 (36). pp. 8854-8862. ISSN 0003-6935

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Wavelength scanning interferometry (WSI) can be used for surface measurement with discontinuous
surface profiles by producing phase shifts without any mechanical scanning process. The choice of algorithms for the WSI to analyze the fringe pattern depends on the desired accuracy and computing speed. This paper provides comparison of four different algorithms to analyze the interference fringe pattern
acquired from WSI. The mathematical description of these algorithms, their computing resolution, and speed are presented. Two step-height samples are measured using the WSI. Experimental results
demonstrate that the accuracy of measuring surface height varies from micrometer to nanometer value depending on the algorithm used to analyze the captured interferograms.

Item Type: Article
Additional Information: This paper was published in Applied Optics and is made available as an electronic reprint with the permission of OSA. The paper can be found at the following URL on the OSA website: [article URL]. Systematic or multiple reproduction or distribution to multiple locations via electronic or other means is prohibited and is subject to penalties under law
Subjects: Q Science > QC Physics
T Technology > TJ Mechanical engineering and machinery
Schools: School of Computing and Engineering
Related URLs:
Depositing User: Feng Gao
Date Deposited: 29 Jan 2013 15:51
Last Modified: 04 Nov 2015 16:17


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