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Surface Roughness interferogram processing system

Chen, Xiaomei, Ren, Dongmei and Li, Zhijun (1997) Surface Roughness interferogram processing system. Metrology & Measurement Technology, 17 (3). pp. 7-10. ISSN 1002-6061

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Abstract

This paper introduces surface roughness interferogram processing system and how to use it to measure surface roughness by computer based image processing technology. The system can measure ra<0.2 um milti-gloove specimen and testing surface by processing a white light interferogram and measure H<5 um step height by processing a white interferogram and sodium light interferogram. former for the height measurement and later for CCD calibration with the advantages of absolute, non-contact, high-speed and automation.

Item Type: Article
Contributors:
ContributionNameEmailORCID
AuthorChen, XiaomeiUNSPECIFIEDUNSPECIFIED
AuthorRen, DongmeiUNSPECIFIEDUNSPECIFIED
AuthorLi, ZhijunUNSPECIFIEDUNSPECIFIED
Subjects: T Technology > TK Electrical engineering. Electronics Nuclear engineering
T Technology > TS Manufactures
Schools: School of Computing and Engineering
Related URLs:
Depositing User: Xiaomei Chen
Date Deposited: 05 Feb 2013 15:45
Last Modified: 01 Dec 2016 21:36
URI: http://eprints.hud.ac.uk/id/eprint/16514

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