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In-process fast surface measurement using wavelength scanning interferometry

Gao, F., Muhamedsalih, Hussam and Jiang, Xiang (2012) In-process fast surface measurement using wavelength scanning interferometry. In: 2012 International Conference on Manufacturing and Optimization , September 15-16, 2012, Beijing, China.

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    Abstract

    A wavelength scanning interferometry system for fast areal surface measurement of
    micro and nano-scale surfaces which is immune to environmental noise is introduced in this paper.
    It can be used for surface measurement of discontinuous surface profiles by producing phase shifts
    without any mechanical scanning process. White light spectral scanning interferometry, together
    with an acousto-optic tuneable filtering technique, is used to measure both smooth surfaces and
    those with large step heights. An active servo control system is used to serve as a phase
    compensating mechanism to eliminate the effects of environmental noise. The system can be used
    for on-line or in-process measurement on a shop floor.

    Item Type: Conference or Workshop Item (Paper)
    Subjects: Q Science > QC Physics
    T Technology > TJ Mechanical engineering and machinery
    T Technology > TS Manufactures
    Schools: School of Computing and Engineering
    Related URLs:
    Depositing User: Feng Gao
    Date Deposited: 11 Oct 2012 14:45
    Last Modified: 11 Oct 2012 14:45
    URI: http://eprints.hud.ac.uk/id/eprint/15365

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