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Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis

Senin, N., Blunt, Liam and Tolley, M. (2012) Dimensional metrology of micro parts by optical three-dimensional profilometry and areal surface topography analysis. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 226 (11). pp. 1819-1832. ISSN 0954-4054

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Abstract

A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.

Item Type: Article
Subjects: T Technology > T Technology (General)
T Technology > TA Engineering (General). Civil engineering (General)
Schools: School of Computing and Engineering
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
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Depositing User: Sharon Beastall
Date Deposited: 13 Sep 2012 10:42
Last Modified: 28 Oct 2013 15:27
URI: http://eprints.hud.ac.uk/id/eprint/14877

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