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Senin, N., Blunt, Liam and Tolley, M. (2012) Dimensional metrology of micropatrd by optical profilometery and areal surface topography analysis. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 226 (11). pp. 1819-1832. ISSN 0954-4054
Metadata only available from this repository.Abstract
A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.
| Item Type: | Article |
|---|---|
| Subjects: | T Technology > T Technology (General) T Technology > TA Engineering (General). Civil engineering (General) |
| Schools: | School of Computing and Engineering School of Computing and Engineering > Centre for Precision Technologies School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group |
| Related URLs: | |
| Depositing User: | Sharon Beastall |
| Date Deposited: | 13 Sep 2012 10:42 |
| Last Modified: | 06 Feb 2013 10:00 |
| URI: | http://eprints.hud.ac.uk/id/eprint/14877 |
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