Senin, N., Blunt, Liam and Tolley, M. (2012) Dimensional metrology of micropatrd by optical profilometery and areal surface topography analysis. Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture, 226 (11). pp. 1819-1832. ISSN 0954-4054Metadata only available from this repository.
A novel approach is proposed for the characterization of critical dimensions and geometric errors, suitable for application to micro-fabricated parts and devices characterized as step-like structured surfaces. The approach is based on acquiring areal maps with a high-precision optical three-dimensional profilometer and on processing topography data with novel techniques obtained by merging knowledge and algorithms from surface metrology, dimensional metrology and computer vision/image processing. Thin-foil laser targets for ion acceleration experiments are selected as the test subject. The main issues related to general applicability and metrological performance of the methodology are identified and discussed.
|Subjects:||T Technology > T Technology (General)|
T Technology > TA Engineering (General). Civil engineering (General)
|Schools:||School of Computing and Engineering|
School of Computing and Engineering > Centre for Precision Technologies
School of Computing and Engineering > Centre for Precision Technologies > Surface Metrology Group
|Depositing User:||Sharon Beastall|
|Date Deposited:||13 Sep 2012 10:42|
|Last Modified:||06 Feb 2013 10:00|
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