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The design and operation of an ultra-high vacuum ion implantation and ion beam deposition system

Armour, D.G., Bailey, Paul, Judge, P.A., Sharples, G., Byers, P. and Whitehead, D. (1985) The design and operation of an ultra-high vacuum ion implantation and ion beam deposition system. In: Proceedings of the Ninth Symposium on Ion Sources and Ion-Assisted Technology. Research Group.

Metadata only available from this repository.
Item Type: Book Chapter
Additional Information: Paper originally presented at ISIAT '85 Tokyo June 3rd-5th, 1985
Subjects: Q Science > Q Science (General)
Q Science > QC Physics
Schools: School of Applied Sciences
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Depositing User: Sharon Beastall
Date Deposited: 05 Sep 2012 12:47
Last Modified: 05 Sep 2012 12:47
URI: http://eprints.hud.ac.uk/id/eprint/14707

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