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Armour, D.G., Bailey, Paul, Judge, P.A., Sharples, G., Byers, P. and Whitehead, D. (1985) The design and operation of an ultra-high vacuum ion implantation and ion beam deposition system. In: Proceedings of the Ninth Symposium on Ion Sources and Ion-Assisted Technology. Research Group.
Metadata only available from this repository.| Item Type: | Book Chapter |
|---|---|
| Additional Information: | Paper originally presented at ISIAT '85 Tokyo June 3rd-5th, 1985 |
| Subjects: | Q Science > Q Science (General) Q Science > QC Physics |
| Schools: | School of Applied Sciences |
| Related URLs: | |
| Depositing User: | Sharon Beastall |
| Date Deposited: | 05 Sep 2012 12:47 |
| Last Modified: | 05 Sep 2012 12:47 |
| URI: | http://eprints.hud.ac.uk/id/eprint/14707 |
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